Silicon Micromachining (Record no. 45291)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00547cam a2200205 4500 |
| 001 - CONTROL NUMBER | |
| control field | i052159054X |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 052159054X |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (Sirsi) i9780521590549 |
| 050 ## - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7871.15. |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Elwenspoek, Miko |
| 245 ## - TITLE STATEMENT | |
| Title | Silicon Micromachining |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Cambridge |
| Name of publisher, distributor, etc | Cambridge University Press |
| Date of publication, distribution, etc | 1999 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 420 p. |
| Accompanying material | hardback. |
| 500 ## - GENERAL NOTE | |
| General note | BookData Record |
| 596 ## - | |
| -- | 1 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Silicon. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Micromachining. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Etching. |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Jansen, Henry V. (both of University of Twente, Netherlands) |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Library of Congress Classification | Main Library | Main Library | General Shelves | TK7871.15 . | 310456-1001 | 03/01/2009 | 1 | 03/01/2009 | Standard |