TY  - BOOK
AU  - Elwenspoek, Miko
AU  - Jansen, Henry V. (both of University of Twente, Netherlands)
TI  - Silicon Micromachining
SN  - 052159054X
AV  - TK7871.15. 
PY  - 1999///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Silicon
KW  - Micromachining
KW  - Etching
N1  - BookData Record
ER  -