TY  - BOOK
AU  - Campbell, S.A. (Department of Chemistry, University of Portsmouth)
AU  - Lewerenz, H.J.
TI  - Semiconductor Micromachining: Vol 1. Fundamental Electrochemistry and Physics
SN  - 0471966819
AV  - TK7871.85. 
PY  - 1998///
CY  - Chichester
PB  - John Wiley and Sons Ltd
KW  - Semiconductors - Design and construction
KW  - Micromachining
KW  - Microfabrication
N1  - BookData Record
ER  -