TY  - BOOK
AU  - Atherton, Paul D.
AU  - Hicks, Thomas R.
TI  - The Nanopositioning Book
SN  - 0953065804
PY  - 1998///
CY  - London
PB  - Kogan Page
KW  - Nanotechnology
KW  - Servomechanisms
KW  - Physical measurements
KW  - Measuring instruments
KW  - Design and construction
N1  - BookData Record
ER  -