| 000 | 00547cam a2200205 4500 | ||
|---|---|---|---|
| 001 | i052159054X | ||
| 020 | _a052159054X | ||
| 035 | _a(Sirsi) i9780521590549 | ||
| 050 | _aTK7871.15. | ||
| 100 | _aElwenspoek, Miko | ||
| 245 | _aSilicon Micromachining | ||
| 260 |
_aCambridge _bCambridge University Press _c1999 |
||
| 300 |
_a420 p. _ehardback. |
||
| 500 | _aBookData Record | ||
| 650 | _aSilicon. | ||
| 650 | _aMicromachining. | ||
| 650 | _aEtching. | ||
| 700 | _aJansen, Henry V. (both of University of Twente, Netherlands) | ||
| 596 | _a1 | ||
| 999 |
_c45291 _d45291 |
||