000			00646cam a2200205 4500
001			i0471966819
020			_a0471966819
035			_a(Sirsi) i9780471966814
050			_aTK7871.85.
100			_aCampbell, S.A. (Department of Chemistry, University of Portsmouth)
245			_aSemiconductor Micromachining: Vol 1. Fundamental Electrochemistry and Physics
260			_aChichester _bJohn Wiley and Sons Ltd _c1998
300			_a330 p. _ehardback.
500			_aBookData Record
650			_aSemiconductors - Design and construction.
650			_aMicromachining.
650			_aMicrofabrication.
700			_aLewerenz, H.J.
596			_a1
999			_c45768 _d45768