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Silicon Micromachining

By: Elwenspoek, MikoContributor(s): Jansen, Henry V. (both of University of Twente, Netherlands)Material type: TextTextReference number:i052159054XPublication details: Cambridge Cambridge University Press 1999 Description: 420 p. hardbackISBN: 052159054XSubject(s): Silicon | Micromachining | EtchingLOC classification: TK7871.15.
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Item type Current library Class number Copy number Status Date due Barcode Item reservations
Standard Standard Main Library General Shelves TK7871.15 . (Browse shelf(Opens below)) 1 Available 310456-1001
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