Normal view MARC view ISBD view

Campbell, S.A. (Department of Chemistry, University of Portsmouth)

Semiconductor Micromachining: Vol 1. Fundamental Electrochemistry and Physics - Chichester John Wiley and Sons Ltd 1998 - 330 p. hardback.

BookData Record

ISBN: 0471966819

Subjects--Topical Terms:
Semiconductors - Design and construction.
Micromachining.
Microfabrication.

LC Class. No.: TK7871.85.