Semiconductor Micromachining: Vol 1. Fundamental Electrochemistry and Physics (Record no. 45768)

MARC details
000 -LEADER
fixed length control field 00646cam a2200205 4500
001 - CONTROL NUMBER
control field i0471966819
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0471966819
035 ## - SYSTEM CONTROL NUMBER
System control number (Sirsi) i9780471966814
050 ## - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7871.85.
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Campbell, S.A. (Department of Chemistry, University of Portsmouth)
245 ## - TITLE STATEMENT
Title Semiconductor Micromachining: Vol 1. Fundamental Electrochemistry and Physics
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Chichester
Name of publisher, distributor, etc John Wiley and Sons Ltd
Date of publication, distribution, etc 1998
300 ## - PHYSICAL DESCRIPTION
Extent 330 p.
Accompanying material hardback.
500 ## - GENERAL NOTE
General note BookData Record
596 ## -
-- 1
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Semiconductors - Design and construction.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Micromachining.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Microfabrication.
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name Lewerenz, H.J.
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Copy number Price effective from Koha item type
    Library of Congress Classification     Main Library Main Library General Shelves     TK7871.85 . 312841-1001 03/01/2009 1 03/01/2009 Standard