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Semiconductor Micromachining: Vol 1. Fundamental Electrochemistry and Physics

By: Campbell, S.A. (Department of Chemistry, University of Portsmouth)Contributor(s): Lewerenz, H.JMaterial type: TextTextReference number:i0471966819Publication details: Chichester John Wiley and Sons Ltd 1998 Description: 330 p. hardbackISBN: 0471966819Subject(s): Semiconductors - Design and construction | Micromachining | MicrofabricationLOC classification: TK7871.85.
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